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SEMI E79-0221 (technical revision)
SEMI MF1727-1110 (Reapproved 1115)
Although the scope of SEMI S3 is PLHS
including sampling rate
E04800 - SEMI E48 - SMIFインデクサ用空間のための仕様 StdPbc-312 SEMI E79-0221 (technical revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Physical Interfaces & Carriers Global Technical CommitteeEuropean Equipment Automation Committee2001424European Regional Standards Committee20018www. semi. org200111199520017 SMIF (SMIF) SEMI E19 Referenced SEMI Standards SEMI E15
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